Epitaxial Barium titanate and Strontium Titanate on Silicon
PRODUCTS
50 mm (2") wafers
Available in early 2023
Epitaxial SrTiO₃ on Si or SOI
2-10 nm thickness
50-mm dia., single- or double-side polished
Epitaxial a-oriented BaTiO₃ on Si or SOI
300 or 500 nm thickness
50-mm dia., single- or double-side polished
Epitaxial c-oriented BaTiO₃ on Si or SOI
100 nm thickness
50-mm dia., single- or double-side polished
Epi-SrTiO₃ or BaTiO₃ on Glass
Epi-wafers can also be delivered sitting on 3 um of amorphous silica on a Si carrier wafer
Custom stacks or thicknesses available on request
200- and 300-mm wafers
Available at the end of 2024
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